The hosts went close to breaking the deadlock on 14 minutes when Gary Roberts' venomous volley was superbly blocked and cleared in the six-yard box by Graham Kavanagh. Two minutes later, a quick free-kick from Huddersfield's Jim Goodwin freed Roberts, but his speculative long-ranger flew over the crossbar.
Huddersfield continued to dominate as Anthony Pilkington jinked his way past three defenders on 21 minutes before blazing his shot off target. But against the run of play Carlisle nearly took the lead, as Ian Morris' dangerous inswinging delivery was diverted inches wide of his own goal by Huddersfield's Andy Butler.
Moments later, Huddersfield came roaring back with Martin Kelly's cross being nodded wide by the well placed Michael Collins. However, the game burst into life four minutes after the restart when Booth fed Roberts, whose pin-point cross found Nathan Clarke, but his header from close range rattled the crossbar before being cleared.
Within 60 seconds Carlisle wasted a gilt-edged opportunity to go ahead, as Jeff Smith sliced his shot wide after latching on to Michael Bridges' neat through ball. And Huddersfield were denied for the second time in the space of three minutes by the woodwork, with Roberts' scorching right-foot curler rebounding off the inside of the post and away to safety.
Relegation threatened Carlisle should have taken the lead on 72 minutes, but substitute Lewis Neal miskicked from six yards out after meeting Cleveland Taylor's superb cross. The visitors then never looking like finding a late equaliser to aid their efforts of avoiding relegation as after Booth's goal the Terriers saw out of the rest of the game in comfort against a shot-shy Cumbrians side.